[en] A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic MEMS/circuits technology with 2 /spl mu/m CMOS and 2.25 /spl mu/m-thick mechanical polysilicon. The on-chip position sense circuit uses correlated double sampling to reject 1/f and kT/C noise and resolves 0.02 angstrom displacements. The gyroscope achieves a noise floor of 3/spl deg//sec//spl radic/Hz at atmospheric pressure and operates from a single 5 V supply.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Jiang, Xuesong
Seeger, Joseph I.
Kraft, Michaël ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Boser, Bernhard E.
Language :
English
Title :
A monolithic surface micromachined Z-axis gyroscope with digital output
