A Monolithic surface micromachined Z-axis gyroscope with digital output

Jiang, X; Seeger, JI; Kraft, Michael; Boser, BE

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A Monolithic surface micromachined Z-axis gyroscope with digital output

Jiang, X; Seeger, JI; Kraft, Michael et al.

2000 • In Proc. Symposium on VLSI Circuits

Peer reviewed

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https://hdl.handle.net/2268/187900

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Jiang, X

Seeger, JI

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Boser, BE

Language :

English

Title :

A Monolithic surface micromachined Z-axis gyroscope with digital output

Publication date :

June 2000

Event name :

Proc. Symposium on VLSI Circuits

Event place :

Hawaii, United States - Hawaii

Event date :

Juin 2000

By request :

Yes

Audience :

International

Main work title :

Proc. Symposium on VLSI Circuits

Pages :

pp. 16-19

Peer reviewed :

Peer reviewed

Available on ORBi :

since 10 November 2015

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