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Advanced control systems for MEMS capacitive sensing accelerometers.
Mokthari, ME; Kraft, Michael
2003In Advanced control systems for MEMS capacitive sensing accelerometers.
Peer reviewed
 

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Disciplines :
Electrical & electronics engineering
Author, co-author :
Mokthari, ME
Kraft, Michael ;  Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Advanced control systems for MEMS capacitive sensing accelerometers.
Publication date :
2003
Event name :
Proc. Micromechanics Europe (MME)
Event place :
Delft, Netherlands
Event date :
Octobre 2003
By request :
Yes
Audience :
International
Main work title :
Advanced control systems for MEMS capacitive sensing accelerometers.
Pages :
pp. 232-234
Peer reviewed :
Peer reviewed
Available on ORBi :
since 09 November 2015

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