Design optimization of an electrostatic MEMS actuator with low spring constant for an "Atom Chip"

Rouabah, H; Gollasch, CO; Kraft, Michael

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Design optimization of an electrostatic MEMS actuator with low spring constant for an "Atom Chip"

Rouabah, H; Gollasch, CO; Kraft, Michael

2005 • In Proc. NSTI Nanotech

Peer reviewed

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https://hdl.handle.net/2268/187437

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Rouabah, H

Gollasch, CO

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Design optimization of an electrostatic MEMS actuator with low spring constant for an "Atom Chip"

Publication date :

2005

Event name :

Proc. NSTI Nanotech

Event place :

Anaheim, United States - California

Event date :

May 2005

By request :

Yes

Audience :

International

Main work title :

Proc. NSTI Nanotech

Pages :

Vol. 3, pp489-492

Peer reviewed :

Peer reviewed

Available on ORBi :

since 30 October 2015

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Bibliography

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E. Koukharenko, et, al., Sensors and Actuators, A 115, 600-607, 2004.
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