Article (Scientific journals)
Three dimensional electrostatic actuators for tunable optical micro cavities
Srinivasan, Prasanna; Gollasch, Carsten O.; Kraft, Michaël
2010In Sensors and Actuators. A, Physical, 161 (1-2), p. 191-198
Peer Reviewed verified by ORBi
 

Files


Full Text
S&A Prasanna 3D_actuator_paper.pdf
Publisher postprint (1.3 MB)
Request a copy

All documents in ORBi are protected by a user license.

Send to



Details



Abstract :
[en] The ability to fabricate micro scale structures with three dimensional features can augment the design opportunities to realise novel devices. This paper discusses the theoretical and experimental performance of a three dimensional Micro-Opto-Electromechanical systems (MOEMS) device which consists of a planar micro mirror positioned in the in-plane and out-of-plane directions by electrostatic actuators. The actuator consists of a mechanically compliant structure micromachined on a bonded Si–Glass substrate. Experimental investigation of the steady state performance of the actuator revealed that the planar mirror can be actuated about ∼3–6 m in the in-plane direction at 90 Vdc and about ∼2 m in the out-of-plane direction at 25 Vdc respectively. The device was found to be dynamically stable for any stray ambient excitations <1.6 kHz in air. The suitability of the device for misalignment compensation in stacked multi-layers is discussed; this will enable for realising tunable optical micro cavities for atom detection.
Disciplines :
Electrical & electronics engineering
Author, co-author :
Srinivasan, Prasanna
Gollasch, Carsten O.
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Three dimensional electrostatic actuators for tunable optical micro cavities
Publication date :
2010
Journal title :
Sensors and Actuators. A, Physical
ISSN :
0924-4247
eISSN :
1873-3069
Publisher :
Elsevier Science, Lausanne, Switzerland
Volume :
161
Issue :
1-2
Pages :
191-198
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 18 September 2015

Statistics


Number of views
73 (1 by ULiège)
Number of downloads
0 (0 by ULiège)

Scopus citations®
 
16
Scopus citations®
without self-citations
16
OpenCitations
 
12

Bibliography


Similar publications



Contact ORBi