Comparative study of different output metrics for a three weakly coupled resonator sensor

[en] This work, for the first time, investigates the characteristics of different output metrics for a three degree-of-freedom (DoF) coupled resonator sensor. The main aspects examined are sensitivity and linear range. It is shown from electrical measurements that using the vibration amplitude ratio as an output signal provides improved sensitivity and linearity range, compared to other methods such as shift in eigenstate, mode frequency or amplitude difference.

Disciplines :

Electrical & electronics engineering

Author, co-author :

Zhao, Chun

Wood, Graham

Xie, J.B.

Chang, Honglong

Pu, Suan

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Comparative study of different output metrics for a three weakly coupled resonator sensor

Publication date :

July 2015

Event name :

18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015)

Event place :

Anchorage, United States

Event date :

from 21-06-2015 to 25-06-2015

Audience :

International

Main work title :

Proceedings of Solid-State Sensors, Actuators and Microsystems (Transducers 2015)

Peer reviewed :

Peer reviewed

Available on ORBi :

since 14 July 2015

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Bibliography

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