Wet etching optimization for arbitrarly shaped planar electrode structures

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Rattanasonti, H; Sterling, RC; Srinivasan, P et al.

2010 • In Proceedings of "MME 2010 Conference, The Netherlands"

Peer reviewed

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https://hdl.handle.net/2268/183541

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Rattanasonti, H

Sterling, RC

Srinivasan, P

Hensinger, WK

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Wet etching optimization for arbitrarly shaped planar electrode structures

Publication date :

September 2010

Event name :

MME 2010 Conference

Event place :

Enschede, Netherlands

Event date :

septembre 2010

Audience :

International

Main work title :

Proceedings of "MME 2010 Conference, The Netherlands"

Peer reviewed :

Peer reviewed

Available on ORBi :

since 02 July 2015

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