Deflection amplification mechanism in a capacitive accelerometer

Zeimpekis, A; Sari, I; Kraft, Michael

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Deflection amplification mechanism in a capacitive accelerometer

Zeimpekis, A; Sari, I; Kraft, Michael

2011 • In Proceedings of "Transducers 2011 Conference - Juin 2011"

Peer reviewed

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https://hdl.handle.net/2268/183475

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Disciplines :

Electrical & electronics engineering

Author, co-author :

Zeimpekis, A

Sari, I

Kraft, Michael ; Université de Liège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés

Language :

English

Title :

Deflection amplification mechanism in a capacitive accelerometer

Publication date :

June 2011

Event name :

Transducers Conference

Event place :

China

Event date :

Juin 2011

Audience :

International

Main work title :

Proceedings of "Transducers 2011 Conference - Juin 2011"

Pages :

1096-1100

Peer reviewed :

Peer reviewed

Available on ORBi :

since 01 July 2015

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Bibliography

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