Unpublished conference/Abstract (Scientific congresses and symposiums)
A stochastic multiscale analysis for MEMS stiction failure
Hoang Truong, Vinh; Wu, Ling; Golinval, Jean-Claude et al.
20151st International Conference on Uncertainty Quantification in Computational Sciences and Engineering (UNCECOMP 2015)
 

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Keywords :
Multi-scale; Stochastic; Stiction
Abstract :
[en] Stiction is a major failure in microelectromechanical system (MEMS) devices in which two contacting surfaces can remain stuck together because of the adhesive forces, such as van der Waals forces and capillary forces. Stiction is a multiscale problem which is characterized by three different lengths: the MEMS device characteristic length, the roughness of the contacting surfaces, and the distance range of the adhesive forces. Because MEMS surfaces roughness and adhesive force distances are of comparable scales, the randomness in the contacting surfaces can result in important uncertainties on the interacting forces, and in turn lead to a scatter in the MEMS structural behavior. The purpose of this work is to quantify the uncertainties on the macro stiction behavior of a MEMS structure due to the randomness in its contacting surfaces. A full analysis, such as the combination of a Monte-Carlo simulation to generate random surfaces combined with finite element (FE) analyses to model the stiction behavior, is expensive in terms of the computational cost due to the difference in the scales between the macro characteristic length and the distance range of the adhesive forces. Thus, in this work, we develop a stochastic multiscale analysis. At the micro scale, the uncertainties in the interacting forces between two rough surfaces are investigated. The power spectral density function of the surface is characterized from experimental topology measurements, and interacting surfaces are then generated as Gaussian random surfaces. For each generated random surface, the interacting adhesive forces are calculated by using a modified Dejarguin-Muller-Toporov (DMT) model. The resulting adhesive contact forces can be integrated using the finite element method at the structural scale by associating to each discretized contacting point a sampled surface. We then use the Monte-Carlo method to quantify the uncertainties in the stiction behavior of the MEMS device.
Disciplines :
Mechanical engineering
Materials science & engineering
Author, co-author :
Hoang Truong, Vinh ;  Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Wu, Ling ;  Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Golinval, Jean-Claude  ;  Université de Liège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Paquay, Stéphane;  Open-Engineering S.A.
Noels, Ludovic  ;  Université de Liège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Language :
English
Title :
A stochastic multiscale analysis for MEMS stiction failure
Publication date :
26 May 2015
Event name :
1st International Conference on Uncertainty Quantification in Computational Sciences and Engineering (UNCECOMP 2015)
Event organizer :
ECCOMAS
Event place :
Crete Island, Greece
Event date :
25-27 May 2015
Audience :
International
References of the abstract :
UNCECOMP 2015
Name of the research project :
3SMVIB: The research has been funded by the Walloon Region under the agreement no 1117477 (CT-INT 2011-11-14) in the context of the ERA-NET MNT framework.
Funders :
Service public de Wallonie : Direction générale opérationnelle de l'économie, de l'emploi et de la recherche - DG06
FRIA - Fonds pour la Formation à la Recherche dans l'Industrie et dans l'Agriculture [BE]
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