Paper published in a book (Scientific congresses and symposiums)Realizing the diamond annular groove phase masks for the mid infrared region: five years of successful process development of diamond plasma etching
Forsberg, Pontus; Vargas Catalan, Ernesto; Delacroix, Christian et al.
2014 • In Navarro, Ramon; Cunningham, Colin; Barto, Allison (Eds.) Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation
Copyright 2014 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
All documents in ORBi are protected by a user license.
Abstract :
[en] The Annular Groove Phase Mask (AGPM) is a circularly symmetric half wave plate consisting of a circular high aspect ratio sub-wavelength grating. Here we present a method for realizing such structures in diamond. To improve the AGPM performance, antireflective sub-wavelength gratings are etched on the backside of the components, and such gratings are also discussed. Components for the N-band (around 10 μm) and the L-band (around 3.8 μm) have been successfully fabricated. We are currently developing the process further to improve the precision of the gratings and produce an AGPM for the K-band (around 2.2 μm). © (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Scopus citations®
without self-citations
2
