Article (Scientific journals)
ICP polishing of silicon for high-quality optical resonators on a chip
Laliotis, A.; Trupke, Michael; Cotter, J. P. et al.
2012In Journal of Micromechanics and Microengineering, 22 (12), p. 125010
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Disciplines :
Electrical & electronics engineering
Author, co-author :
Laliotis, A.
Trupke, Michael
Cotter, J. P.
Lewis, Gareth Neil
Kraft, Michaël ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Hinds, Edward A.
Language :
English
Title :
ICP polishing of silicon for high-quality optical resonators on a chip
Publication date :
2012
Journal title :
Journal of Micromechanics and Microengineering
ISSN :
0960-1317
Publisher :
Institute of Physics Publishing, United Kingdom
Volume :
22
Issue :
12
Pages :
125010
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 10 March 2015

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