Article (Scientific journals)
Encapsulation of implantable integrated MEMS pressure sensors using Polyimide Epoxy composite and Atomic Layer Deposition
Gembaczka, Pierre; Goertz, Michael; Goehlich, Andreas et al.
2014In Journal of Sensors and Sensor Systems
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Disciplines :
Electrical & electronics engineering
Author, co-author :
Gembaczka, Pierre
Goertz, Michael
Goehlich, Andreas
Mokwa, Wilfried
Kraft, Michael ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Systèmes microélectroniques intégrés
Language :
English
Title :
Encapsulation of implantable integrated MEMS pressure sensors using Polyimide Epoxy composite and Atomic Layer Deposition
Publication date :
2014
Journal title :
Journal of Sensors and Sensor Systems
ISSN :
2194-8771
eISSN :
2194-878X
Publisher :
Copernicus Publications, Germany
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 04 March 2015

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