[en] The miniature sizes of micro–electro–mechanical systems (MEMS) as well as the nature of their manufacturing processes, such as etching, material layer deposition, or embossing, are responsible for the existence of a scatter in the final dimensions, material properties ... of manufactured micro–sensors. This scatter is potentially threatening the behavior and reliability of samples from a batch fabrication process, motivating the development of non-deterministic computational approaches to predict the MEMS properties.
In this work we extract the meso-scale properties of the poly-silicon material under the form of a probabilistic distribution.
To this end, Statistical Volume Elements (SVE) of the micro-structure are generated under the form of a Voronoï tessellation with a random orientation for each silicon grain. Hence, a Monte-Carlo procedure combined with a homogenization technique allows a distribution of the material tensor at the meso-scale to be estimated. As the finite element method is used to discretize the SVE and to solve the micro-scale boundary value problem, the homogenization technique used to extract the material tensor relies on the computational homogenization theory.
In a future work, we will investigate, in the context of MEMS vibrometers, the propagation to the macro–scale of the meso-scale distribution of the homogenized elasticity tensor, with the final aim of predicting the uncertainty on their resonance frequencies.
Lucas, Vincent ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Wu, Ling ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Arnst, Maarten ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational and stochastic modeling
Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures
Paquay, Stephane; Open Engineering SA
Noels, Ludovic ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)
Language :
English
Title :
Prediction of meso-scale mechanical properties of poly-silicon materials
Publication date :
27 August 2014
Event name :
EMMC14 - European Mechanics of Materials Conference 2014
Event organizer :
EuroMech
Event place :
Gothenburg, Sweden
Event date :
27 - 29 August, 2014
Audience :
International
Name of the research project :
3SMVIB: The research has been funded by the Walloon Region under the agreement no 1117477 (CT-INT 2011-11-14) in the context of the ERA-NET MNT framework.
Funders :
Service public de Wallonie : Direction générale opérationnelle de l'économie, de l'emploi et de la recherche - DG06