Prediction of macroscopic mechanical properties of a polycrystalline microbeam subjected to material uncertainties

Lucas, Vincent; Wu, Ling; Arnst, Maarten; Golinval, Jean-Claude; Paquay, Stéphane; Nguyen, Van Dung; Noels, Ludovic

Paper published in a book (Scientific congresses and symposiums)

Lucas, Vincent; Wu, Ling; Arnst, Maarten et al.

2014 • In Cunha, Álvaro; Caetano, Elsa; Ribeiro, Pedro et al. (Eds.) Proceedings of the 9th International Conference on Structural Dynamics, EURODYN 2014

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Keywords :

MEMS; Stochastic homogenization; Micro-beam resonance frequency; LIMARC

Abstract :

[en] The first resonance frequency is a key performance characteristic of MEMS vibrometers. In batch fabrication, this first resonance frequency can exhibit scatter owing to various sources of manufacturing variability involved in the fabrication process. The aim of this work is to develop a stochastic multiscale model for predicting the first resonance frequency of MEMS microbeams constituted of polycrystals while accounting for the uncertainties in the microstructure due to the grain orientations. At the finest scale, we model the microstructure of polycrystaline materials using a random Voronoï tessellation, each grain being assigned a random orientation. Then, we apply a computational homogenization procedure on statistical volume elements to obtain a stochastic characterization of the elasticity tensor at the second scale of interest, the meso-scale. In the future, using a stochastic finite element method, we will propagate these meso-scale uncertainties to the first resonance frequency at the coarser scale.

Disciplines :

Materials science & engineering
Mechanical engineering

Author, co-author :

Lucas, Vincent ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)

Wu, Ling ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)

Arnst, Maarten ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational and stochastic modeling

Golinval, Jean-Claude ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures

Paquay, Stéphane; Open-Engineering SA

Nguyen, Van Dung ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)

Noels, Ludovic ; Université de Liège - ULiège > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3)

Language :

English

Title :

Prediction of macroscopic mechanical properties of a polycrystalline microbeam subjected to material uncertainties

Publication date :

June 2014

Event name :

Proceedings of the 9th International Conference on Structural Dynamics, EURODYN 2014

Event organizer :

European Association for Structural Dynamics (EASD) and the Faculty of Engineering of the University of Porto (FEUP)

Event place :

Porto, Portugal

Event date :

30 June - 2 July, 2014

Audience :

International

Main work title :

Proceedings of the 9th International Conference on Structural Dynamics, EURODYN 2014

Editor :

Cunha, Álvaro

Caetano, Elsa

Ribeiro, Pedro

Muller, G

ISBN/EAN :

978-972-752-165-4

Pages :

2691-2698

Name of the research project :

Project 3SMVIB, no 1117477 (CT-INT 2011-11-14) in the context of the ERA-NET MNT

Funders :

Service public de Wallonie : Direction générale opérationnelle de l'économie, de l'emploi et de la recherche - DG06

Available on ORBi :

since 06 August 2014

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Bibliography

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