Unpublished conference/Abstract (Scientific congresses and symposiums)
Chemically resistant encapsulation for MEMS release
Stoukatch, Serguei; Tooten, ester; Axisa, Fabrice et al.
2012Smart Systems Integration 2012
 

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Keywords :
novel MEMS fabrication proces; “packaging first, MEMS release second”; MEMS packaging
Abstract :
[en] We have proposed and explored a novel sequence in MEMS fabrication process flow. The novel MEMS fabrication process flow can be shortly described as a “packaging first, MEMS release second”. We propose to package the MEMS device first (die mount, wire bonding and encapsulation) and to perform the MEMS release as the last step in the fabrication process flow. The standard route for IC manufacturing is, that the die packaging is the last step [1]. Such approach can’t be directly transferred and used for MEMS fabrication [2]. The main reason for that, that the MEMS device after the release becomes vulnerable to any physical and chemical exposure. Such exposure can occur during transportation, handling or any post-processing (incl. the packaging).
Disciplines :
Electrical & electronics engineering
Author, co-author :
Stoukatch, Serguei  ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Electronique, microsystèmes, mesures et instrumentation
Tooten, ester;  Université Catholique de Louvain - UCL
Axisa, Fabrice ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Electronique, microsystèmes, mesures et instrumentation
Heusdens, Bruno;  Taipro
Francis, Laurent;  Université Catholique de Louvain - UCL
Destiné, Jacques ;  Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Electronique, microsystèmes, mesures et instrumentation
Language :
English
Title :
Chemically resistant encapsulation for MEMS release
Publication date :
21 March 2012
Event name :
Smart Systems Integration 2012
Event date :
from 21-03-2012 to 22-03-2012
Name of the research project :
MINATIS
Funders :
FEDER - Fonds Européen de Développement Régional [BE]
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since 20 July 2014

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