MEMS packaging is crucial for system performance and reliability

Saint-Mard, Michel; Stoukatch, Serguei

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Scientific conference in universities or research centers (Scientific conferences in universities or research centers)

MEMS packaging is crucial for system performance and reliability

Saint-Mard, Michel; Stoukatch, Serguei

2012

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https://hdl.handle.net/2268/169729

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Keywords :

MEMS packaging; performance and reliability; system integration

Disciplines :

Electrical & electronics engineering

Author, co-author :

Saint-Mard, Michel

Stoukatch, Serguei ; Université de Liège - ULiège > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Electronique, microsystèmes, mesures et instrumentation

Language :

English

Title :

MEMS packaging is crucial for system performance and reliability

Publication date :

27 March 2012

Event name :

The Microsystem design flow: From layout to Packaging

Event place :

Liege, Belgium

Event date :

27-03-2012

Audience :

International

Available on ORBi :

since 30 June 2014

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