Article (Scientific journals)
Nanosphere Lithography: A Powerful Method for the Controlled Manufacturing of Nanomaterials
Colson, Pierre; Henrist, Catherine; Cloots, Rudi
2013In Journal of Nanomaterials
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Abstract :
[en] The never-ending race towards miniaturization of devices induced an intense research in the manufacturing processes of the components of those devices. However, the complexity of the process combined with high equipment costs makes the conventional lithographic techniques unfavorable for many researchers. Through years, nanosphere lithography (NSL) attracted growing interest due to its compatibility with wafer-scale processes as well as its potential to manufacture a wide variety of homogeneous one-, two-, or three-dimensional nanostructures. This method combines the advantages of both top-down and bottom-up approaches and is based on a two-step process: (1) the preparation of a colloidal crystal mask (CCM) made of nanospheres and (2) the deposition of the desired material through the mask. The mask is then removed and the layer keeps the ordered patterning of the mask interstices. Many groups have been working to improve the quality of the CCMs. Throughout this review, we compare the major deposition techniques to manufacture the CCMs (focusing on 2D polystyrene nanospheres lattices), with respect to their advantages and drawbacks. In traditional NSL, the pattern is usually limited to triangular structures. However, new strategies have been developed to build up more complex architectures and will also be discussed.
Disciplines :
Chemistry
Author, co-author :
Colson, Pierre  ;  Université de Liège - ULiège > Département de chimie (sciences) > LCIS - GreenMAT
Henrist, Catherine ;  Université de Liège - ULiège > Département de chimie (sciences) > LCIS - GreenMAT
Cloots, Rudi ;  Université de Liège - ULiège > Département de chimie (sciences) > LCIS - GreenMAT
Language :
English
Title :
Nanosphere Lithography: A Powerful Method for the Controlled Manufacturing of Nanomaterials
Publication date :
26 August 2013
Journal title :
Journal of Nanomaterials
ISSN :
1687-4110
eISSN :
1687-4129
Publisher :
Hindawi Publishing Corporation
Peer reviewed :
Peer Reviewed verified by ORBi
Available on ORBi :
since 25 October 2013

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