Abstract :
[en] We will present a new concept related to the micromechanical sensors for detecting the presence and concentration of chemical substances and/or biological organisms. A bi-dimensional array of micro-cantilever coated by different types of sensing layer enables to identify a characteristic chemical composition of the gas in real-time mode. The selective molecular absorption by cantilever sensing layer will produce cantilever bending proportional to the concentration of molecules. To increase the gas sensor sensitivity, the SPR phenomenon is used for cantilever deflection monitoring.
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