Reference : High-temperature polyimide nanofoams for microelectronic applications
Scientific journals : Article
Physical, chemical, mathematical & earth Sciences : Chemistry
Engineering, computing & technology : Materials science & engineering
http://hdl.handle.net/2268/15325
High-temperature polyimide nanofoams for microelectronic applications
English
Hedrick, James L [IBM Almaden Research Center, San Jose, USA > > > >]
Carter, K. R. [IBM Almaden Research Center, San Jose, USA > > > >]
Cha, J. E. [IBM Almaden Research Center, San Jose, USA > > > >]
DiPietro, R. A. [IBM Almaden Research Center, San Jose, USA > > > >]
Labadie, J. W. [IBM Almaden Research Center, San Jose, USA > > > >]
Miller, R. D. [IBM Almaden Research Center, San Jose, USA > > > >]
Russell, T. P. [IBM Almaden Research Center, San Jose, USA > > > >]
Sanchez, M. I. [IBM Almaden Research Center, San Jose, USA > > > >]
Volksen, W. [IBM Almaden Research Center, San Jose, USA > > > >]
Yoon, D. Y. [IBM Almaden Research Center, San Jose, USA > > > >]
Mecerreyes, David [University of Liège (ULg) > Department of Chemistry > Center for Education and Research on Macromolecules (CERM) > >]
Jérôme, Robert mailto [University of Liège (ULg) > Department of Chemistry > Center for Education and Research on Macromolecules (CERM) > >]
McGrath, J. E. [Virginia Polytechnic Institute and State University, USA > > > >]
Jun-1996
Reactive & Functional Polymers
Elsevier Science Bv
30
1-3
43-53
Yes (verified by ORBi)
International
1381-5148
Amsterdam
[en] nanostructured material ; nanofoam
[en] Foamed polyimides have been developed in order to obtain thin film dielectric layers with very low dielectric constants for use in microelectronic devices. In these systems the pore sizes are in the nanometer range, thus, the term 'nanofoam'. The polyimide foams are prepared from block copolymers consisting of thermally stable and thermally labile blocks, the latter being the dispersed phase. Foam formation is effected by thermolysis of the thermally labile block, leaving pores of the size and shape corresponding to the initial copolymer morphology. Nanofoams prepared from a number of polyimides as matrix materials were investigated as well as from a number of thermally labile polymers. The foams were characterized by a variety of experiments including TEM, SAXS, WAXD, DMTA, density measurements. refractive index measurements and dielectric constant measurements. Thin film foams, with high thermal stability and low dielectric constants approaching 2.0, can be prepared using the copolymer/nanofoam approach.
Center for Education and Research on Macromolecules (CERM)
Researchers
http://hdl.handle.net/2268/15325
10.1016/1381-5148(96)00020-X
http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TY0-3VTNWYW-D-1&_cdi=5604&_user=532038&_orig=browse&_coverDate=06%2F30%2F1996&_sk=999699998&view=c&wchp=dGLbVzz-zSkzS&md5=8aa029d95dea5fb401f53fca2020781d&ie=/sdarticle.pdf
http://www.elsevier.com/wps/find/journaldescription.cws_home/502694/description#description
The authors acknowledge Reactive & Functional Polymers (Elsevier) for allowing them to archive this paper.

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