Reference : Stiction Failure in Microswitches Due to Elasto-Plastic Adhesive Contacts
Parts of books : Contribution to collective works
Engineering, computing & technology : Mechanical engineering
Engineering, computing & technology : Materials science & engineering
http://hdl.handle.net/2268/128286
Stiction Failure in Microswitches Due to Elasto-Plastic Adhesive Contacts
English
Wu, Ling mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Golinval, Jean-Claude mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]
Noels, Ludovic mailto [Université de Liège - ULg > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]
2013
MEMS and Nanotechnology, Volume 6
Shaw, Gordon
Prorok, Bart
Starman, LaVern
Springer
Conference Proceedings of the Society for Experimental Mechanics Series, Vol. 42
pages 67-74
No
978-1-4614-4435-0
Researchers ; Professionals
http://hdl.handle.net/2268/128286
10.1007/978-1-4614-4436-7_11
http://rd.springer.com/chapter/10.1007/978-1-4614-4436-7_11
Undesirable stiction, which results from contact between surfaces, is a major failure mode in micro-switches. Indeed the adhesive forces can become so important that the two surfaces remain permanently glued, limiting the life-time of the MEMS. This is especially true when contact happens between surfaces where elasto-plastic asperities deform permanently until the surfaces reach plastic accommodation, increasing the surface forces. To predict this behavior, a micro adhesive-contact model is developed, which accounts for the surfaces topography evolutions during elasto-plastic contacts. This model can be used at a higher scale to study theMEMS behavior, and thus its life-time. TheMEMS devices studied here are assumed to work in a dry environment. In these operating conditions only the Van derWaals forces have to be considered
for adhesion. For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch. To determine the degree of plasticity involved, the impact energy of the movable electrode at pull-in is estimated. Thus the maximal adhesive force is predicted using the developed model.

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