|Reference : Stiction Failure in Microswitches Due to Elasto-Plastic Adhesive Contacts|
|Parts of books : Contribution to collective works|
|Engineering, computing & technology : Mechanical engineering|
Engineering, computing & technology : Materials science & engineering
|Stiction Failure in Microswitches Due to Elasto-Plastic Adhesive Contacts|
|Wu, Ling [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]|
|Golinval, Jean-Claude [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >]|
|Noels, Ludovic [Université de Liège - ULg > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >]|
|MEMS and Nanotechnology, Volume 6|
|Conference Proceedings of the Society for Experimental Mechanics Series, Vol. 42|
|Researchers ; Professionals|
|Undesirable stiction, which results from contact between surfaces, is a major failure mode in micro-switches. Indeed the adhesive forces can become so important that the two surfaces remain permanently glued, limiting the life-time of the MEMS. This is especially true when contact happens between surfaces where elasto-plastic asperities deform permanently until the surfaces reach plastic accommodation, increasing the surface forces. To predict this behavior, a micro adhesive-contact model is developed, which accounts for the surfaces topography evolutions during elasto-plastic contacts. This model can be used at a higher scale to study theMEMS behavior, and thus its life-time. TheMEMS devices studied here are assumed to work in a dry environment. In these operating conditions only the Van derWaals forces have to be considered
for adhesion. For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch. To determine the degree of plasticity involved, the impact energy of the movable electrode at pull-in is estimated. Thus the maximal adhesive force is predicted using the developed model.
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