Destiné, Jacques[Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Electronique, microsystèmes, mesures et instrumentation >]
22-May-2012
2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012)
Suga, Tadatomo
Takagi, Hideki
Higurashi, Heiji
IEEE
181-184
No
No
International
978-1-4673-0740-6
Tokyo
Japon
3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012)
May 22-23, 2012
Professor Dr. Tadatomo Suga, The Univeristy of Tokyo
Tokyo, Hongo
Japan
[en] bio-packaging ; microfluidics ; low temperature assembly ; biocompatibility
[en] We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation.