Reference : Finite element modeling of electrostatic MEMS including the impact of fringing field ...
Scientific journals : Article
Engineering, computing & technology : Electrical & electronics engineering
http://hdl.handle.net/2268/11850
Finite element modeling of electrostatic MEMS including the impact of fringing field effects on forces
English
Boutaayamou, Mohamed mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
V Sabariego, Ruth mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
Dular, Patrick mailto [Université de Liège - ULg > Dép. d'électric., électron. et informat. (Inst.Montefiore) > Applied and Computational Electromagnetics (ACE) >]
2008
Sensor Letters
6
1
115-120
Yes (verified by ORBi)
International
1546-198X
[en] Finite Element Method, Fringing Field Effects, Electrostatic Forces, Capacitances, Electrostatic MEMS
[en] The numerical models describing the behaviour of electrostatically actuated microsystems often disregard fringing fields. However, taking fringing fields into account is crucial for an accurate computation of the electrostatic forces. In this work, the finite element method is applied for modeling electrostatic actuators. The electrostatic force distribution is obtained by locally applying the virtual work method. A micro-beam and a comb drive are considered as test cases. The impact of the fringing field effects on the accurate computation of electrostatic forces and capacitances is shown through 2D and 3D parametric studies.
Researchers ; Professionals ; Students
http://hdl.handle.net/2268/11850
10.1166/sl.2008.006
http://www.ingentaconnect.com/content/asp/senlet/2008/00000006/00000001/art00014?token=003612b027383a4b3b257b517b455f7a384d3b7467472a72752d7b

File(s) associated to this reference

Fulltext file(s):

FileCommentaryVersionSizeAccess
Restricted access
08sensorletters_eurosime06_boutaayamou_fringing.pdfPublisher postprint413.87 kBRequest copy

Bookmark and Share SFX Query

All documents in ORBi are protected by a user license.