Reference : Laser thermoreflectance for semiconductor thin films metrology
Scientific congresses and symposiums : Paper published in a book
Physical, chemical, mathematical & earth Sciences : Multidisciplinary, general & others
http://hdl.handle.net/2268/117084
Laser thermoreflectance for semiconductor thin films metrology
English
Gailly, Patrick mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Hastanin, Juriy mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Duterte, Charles [ > > ]
Hernandez, Yves [ > > ]
Lecourt, Jean-Bernard [ > > ]
Kupisiewicz, Axel [ > > ]
Martin, Paul-Etienne [ > > ]
Fleury-Frenette, Karl mailto [Université de Liège - ULg > > CSL (Centre Spatial de Liège) >]
Jun-2012
Photonics for Solar Energy Systems IV
Wehrspohn, R. B., Gombert, A
SPIE; 8438
No
International
2012 Photonics Europe
from 16-04-2012 to 19-04-2012
SPIE
Brussels
[en] laser scribing ; solar cells ; thermoreflectance ; CdTe thin film ; thermal diffusivity
[en] We present a thermoreflectance-based metrology concept applied to compound semiconductor thin films off-line characterization in the solar cells scribing process. The presented thermoreflectance setup has been used to evaluate the thermal diffusivity of thin CdTe films and to measure eventual changes in the thermal properties of 5 μm CdTe films ablated by nano and picosecond laser pulses. The temperature response of the CdTe thin film to the nanosecond heating pulse has been numerically investigated using the finite-difference time-domain (FDTD) method. The computational and experimental results have been compared.
Centre Spatial de Liège - CSL
Région wallonne : Direction générale des Technologies, de la Recherche et de l'Energie - DGTRE
MUSICAL
Researchers ; Professionals
http://hdl.handle.net/2268/117084

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