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| Reference : Stiction failure in microswitches due to elasto-plastic adhesive contact |
| Scientific congresses and symposiums : Paper published in a book | |||
| Engineering, computing & technology : Materials science & engineering Engineering, computing & technology : Mechanical engineering | |||
| http://hdl.handle.net/2268/116944 | |||
| Stiction failure in microswitches due to elasto-plastic adhesive contact | |
| English | |
Wu, Ling  [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >] | |
| Golinval, Jean-Claude [Université de Liège - ULg > Département d'aérospatiale et mécanique > LTAS - Vibrations et identification des structures >] | |
| Noels, Ludovic [Université de Liège - ULg > Département d'aérospatiale et mécanique > Computational & Multiscale Mechanics of Materials (CM3) >] | |
| 2012 | |
| Proceedings of the XII SEM International Conference & Exposition on Experimental and Applied Mechanics | |
| 9 pages | |
| No | |
| International | |
| XII SEM International Conference & Exposition on Experimental and Applied Mechanics | |
| 11-14 June 2012 | |
| Society for Experimental Mechanics Inc. | |
| Costa Mesa | |
| USA | |
| [en] Undesirable stiction, which results from contact between surfaces, is a major failure mode in micro-switches. Indeed the adhesive forces can become so important that the two surfaces remain permanently glued, limiting the life-time of the MEMS.
This is especially true when contact happens between surfaces where elasto-plastic asperities deform permanently until the surfaces reach plastic accommodation, increasing the surface forces. To predict this behavior, a micro adhesive-contact model is developed, which accounts for the surfaces topography evolutions during elasto-plastic contacts. This model can be used at a higher scale to study the MEMS behavior, and thus its life-time. The MEMS devices studied here are assumed to work in a dry environment. In these operating conditions only the Van der Waals forces have to be considered for adhesion. For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch. To determine the degree of plasticity involved, the impact energy of the movable electrode at pull-in is estimated. Thus the maximal adhesive force is predicted using the developed model. | |
| Researchers ; Professionals | |
| http://hdl.handle.net/2268/116944 | |
| ©2012 Society for Experimental Mechanics Inc. |
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