Course notes (Learning materials)
Micro-usinage par laser excimère
Gailly, Patrick
2007
 

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Keywords :
excimer laser; micromachining
Disciplines :
Engineering, computing & technology: Multidisciplinary, general & others
Author, co-author :
Gailly, Patrick ;  Université de Liège - ULiège > CSL (Centre Spatial de Liège)
Language :
French
Title :
Micro-usinage par laser excimère
Alternative titles :
[en] Excimer laser micromachining
Publication date :
November 2007
Available on ORBi :
since 05 April 2012

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