[en] uncertainty quantification ; nanoelectromechanical system ; stochastic finite element method
[en] This article is concerned with the probabilistic modeling of the electromechanical behavior of nanostructures to assess the effect of variations in geometrical characteristics on the device performance. The topological uncertainty that may be present in the position of the boundaries of nanostructures is accommodated by treating these boundaries as stochastic processes. It is shown how the probabilistic electromechanical models thus obtained can be discretized with the help of Galerkin projections on polynomial chaos expansions. An illustration is provided to demonstrate the proposed framework.