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Peer Reviewed
See detailRELIABILITY ACCELERATED TESTING OF MEMS ACCCELEROMETERS
Bazu, Marius; Gălăţeanu, Lucian; Ilian, Virgil Emil et al

in IEEE Sensors Journal (2007), 1

An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants ... [more ▼]

An attempt to assess the reliability of a batch of MEMS accelerometers is presented. The testing plan is application oriented and contains combined tests: thermal and mechanical stresses (two variants: vibration and tilting) were used. The results demonstrated the good reliability of the tested device, the failure rate being smaller than 6.10-8h-1. [less ▲]

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