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See detailLow temperature assembly method of microfluidic bio-molecules detection device
Van Loo, Stéphanie ULg; Stoukatch, Serguei ULg; Van Overstraeten-Schlögel, Nancy et al

in Suga, Tadatomo; Takagi, Hideki; Higurashi, Heiji (Eds.) 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012) (2012, May 22)

We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on ... [more ▼]

We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation. [less ▲]

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