  Low temperature assembly method of microfluidic bio-molecules detection deviceVan Loo, Stéphanie  ; Stoukatch, Serguei ; et alin Suga, Tadatomo; Takagi, Hideki; Higurashi, Heiji (Eds.) 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012) (2012, May 22) We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on ... [more ▼] We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation. [less ▲] Detailed reference viewed: 27 (21 ULg)Low temperature assembly method of microfluidic bio-molecules detection deviceVan Loo, Stéphanie ; Stoukatch, Serguei ; et alin Suga, Tadatomo; Takagi, Hideki; Higurashi, Eiji (Eds.) 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012) (2012, May 22) We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on ... [more ▼] We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation. [less ▲] Detailed reference viewed: 28 (23 ULg) Micro-multi-sensor platform for industrial processes monitoringSaint-Mard, Michel ; Heusdens, Bruno ; Stoukatch, Serguei et alPoster (2010, March) Detailed reference viewed: 45 (12 ULg) |
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