  Nanomechanical and nanotribological characterization of microelectromechanical system; ; Golinval, Jean-Claude  in Journal of Optoelectronics and Advanced Materials [= JOAM] (2012), 14(3-4), 401-412 Investigations of the mechanical and tribological properties of microelectromechanical system (MEMS) components on nanoscale can provide insights into failure mechanism of material. The main goal of this ... [more ▼] Investigations of the mechanical and tribological properties of microelectromechanical system (MEMS) components on nanoscale can provide insights into failure mechanism of material. The main goal of this paper is focused on the mechanical and tribological characterizations of MEMS mechanical components in order to improve their reliability design. The mechanical properties of interests are stiffness, modulus of elasticity, stress, strain. Dynamical investigations are performed to analyze the resonant frequency response, velocity and amplitude of oscillations of electrostatically actuated microcomponents and to estimate the quality factor. Finite element analysis is used to validate the experimental results of mechanical properties and to simulate the dynamical behaviour of investigated microcomponents. Tribological investigations are developed to estimate the stiction and friction. Testing and the individual characterization of MEMS materials and structures, performed using advanced equipments such as atomic force microscope and optical vibrometer analyzer are presented. [less ▲] Detailed reference viewed: 66 (0 ULg)Mechanical and tribological characterization of a thermally actuated MEMS cantilever; ; Golinval, Jean-Claude in Microsystem Technologies (2012) The temperature effect on the mechanical and tribological behaviors of a microelectromechanical systems cantilever is experimentally investigated using an atomic force microscope. A nonlinear variation of ... [more ▼] The temperature effect on the mechanical and tribological behaviors of a microelectromechanical systems cantilever is experimentally investigated using an atomic force microscope. A nonlinear variation of the bending stiffness of microcantilevers as a function of temperature is determined. The variation of the adhesion force between the tip of atomic force microscope (AFM) probe (Si3N4) and the microcantilever fabricated in gold is monitored at different temperatures. Using the lateral mode operation of atomic force microscope, the influence of temperature on friction coefficient between the tip of AFM probe and microcantilever is presented. Finite element analysis is used to estimate the thermal field distribution in microcantilever and the axial expansion. [less ▲] Detailed reference viewed: 8 (0 ULg) |
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