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See detailMechanical properties of Al/Al2O3 nanolaminated films: correlation to microstructure
Ben Daia, M.; Aubert, P.; Labdi, S. et al

in Surface & Coatings Technology (2000), 125(1-3), 196-200

Wear resistance and the hardness of Al/Al2O3 nanolaminated films were investigated in this study. Monolithic films and multilayers were deposited on a silicon substrate with two different substrate ... [more ▼]

Wear resistance and the hardness of Al/Al2O3 nanolaminated films were investigated in this study. Monolithic films and multilayers were deposited on a silicon substrate with two different substrate temperatures: T-s= 25 degrees C and T-s= -90 degrees C. The period thickness of multilayers was lowering from 40 to 2 nm. From nanoindentation measurements, it appears that the hardness of multilayers has an intermediate value between those of metal (Al) and ceramic (Al2O3). The tribological test was conducted by the pin-on-disc method. The T-s=25 degrees C deposited multilayers, as well as single films, demonstrated poor wear resistance. The best wear resistance was obtained for multilayers deposited at the lowest substrate temperature (T-s= -90 degrees C). The results are ill good agreement with structural characterization. X-ray reflectometry demonstrated that the multilayer character of Al/Al2O3 is more pronounced for T-s= -90 degrees C. (C) 2000 Elsevier Science S.A. All rights reserved. [less ▲]

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See detailNanoindentation investigation of Ti/TiN multilayers films
Ben Daia, M.; Aubert, P.; Labdi, S. et al

in Journal of Applied Physics (2000), 87(11), 7753-7757

The hardness of Ti/TiN nanolaminated films is investigated in this study. Monolithic Ti and TiN films and Ti/TiN multilayers were deposited on silicon substrates by radio-frequency sputtering. The period ... [more ▼]

The hardness of Ti/TiN nanolaminated films is investigated in this study. Monolithic Ti and TiN films and Ti/TiN multilayers were deposited on silicon substrates by radio-frequency sputtering. The period thickness of multilayers was decreased from 20 to 2.5 nm. Grazing x-ray reflectometry showed that the modulation of composition of Ti/TiN multilayers exists for all the period thickness considered. From nanoindentation measurements, we determined the hardness and Young's modulus of multilayers. Hardness increased with decreasing period thickness to go beyond the rule-of-mixture value for samples with period thickness of Lambda less than or equal to 5 nm. The maximum hardness, 1.6 times higher than the value obtained by the rule of mixture, is obtained for Lambda=2.5 nm. Our results are compared to a dislocation-based model previously introduced by Lehoczky. (C) 2000 American Institute of Physics. [S0021-8979(00)09411-1]. [less ▲]

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