N-type and p-type ultra shallow junctions by atomic layer epitaxy and laser annealNguyen, Ngoc Duy ; ; et alConference (2011) Detailed reference viewed: 38 (0 ULg) Vapor phase doping for ultra shallow junction formation in advanced Si CMOS devices; Nguyen, Ngoc Duy ; et alPoster (2010) Detailed reference viewed: 28 (1 ULg) |
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