N-type and p-type ultra shallow junctions by atomic layer epitaxy and laser annealNguyen, Ngoc Duy ; ; et alConference (2011) Detailed reference viewed: 38 (0 ULg)![]() Depth resolution and surface transients in crystalline Silicon at ultra low energies; ; et al Poster (2009) Detailed reference viewed: 21 (0 ULg) |
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