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Roughness evolution of some X-UV reflective materials induced by low energy (< 1 keV) ion beam milling
Gailly, Patrick; Jamar, Claude; Fleury-Frenette, Karl et al.
2004 • In Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms, 216, p. 206-212

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pgailly_emrs2003_NIMB.pdf

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