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Improved surface quality of anisotropically etched silicon {111} planes for mm-scale integrated optics

Cotter, J. P.; Zeimpekis, Ioannis; Kraft, Michaël et al.

2013 • In Journal of Micromechanics and Microengineering, 23 (11), p. 117006

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JMM surface quality comparison pyramids 2013.pdf

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